Optical anisotropy of glancing angle deposited thin films on nano-patterned substrates

dc.contributor.authorGrineviciute, L.
dc.contributor.authorMoein, T.
dc.contributor.authorHan, M.
dc.contributor.authorNg, S.H.
dc.contributor.authorAnand, V.
dc.contributor.authorKatkus, T.
dc.contributor.authorRyu, M.
dc.contributor.authorMorikawa, J.
dc.contributor.authorTobin, M.J
dc.contributor.authorVongsvivut, J.
dc.contributor.authorTolenis, T.
dc.date.accessioned2023-07-05T07:14:28Z
dc.date.available2023-07-05T07:14:28Z
dc.date.issued2022
dc.description.abstractThis study has demonstrated that 3D columnar micro-films/coatings can be deposited over pre-patterned surfaces with sub-micrometer periodic patterns. Four-angle polarisation analysis of thin (0.4 − 1~μm) Si and SiO2 films, evaporated via glancing angle deposition (GLAD) at 70° to the normal, was carried out in reflection mode using synchrotron infrared microspectroscopy at the Australian Synchrotron. The angular dependence of absorbance followed A(θ) ∝ cos 2θ, confirmed for Si substrates patterned by electron beam lithography and plasma etching, which were used to make checkerboard patterns of Λ = 0.4~μm period on Si. Retardance control by birefringence of a patterned SiO2 substrate coated by columnar SiO2 is promising for UV-visible applications due to the use of the same material to endow polarisation control.et
dc.identifier.urihttps://doi.org/10.1364/OME.451669
dc.identifier.urihttps://hdl.handle.net/10062/91319
dc.language.isoenget
dc.publisherOptica Publishing Groupet
dc.relationinfo:eu-repo/grantAgreement/EC/H2020/857627///CIPHRet
dc.rightsinfo:eu-repo/semantics/openAccesset
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.titleOptical anisotropy of glancing angle deposited thin films on nano-patterned substrateset
dc.typeinfo:eu-repo/semantics/articleet

Files

Original bundle

Now showing 1 - 1 of 1
Loading...
Thumbnail Image
Name:
ome_12_3_1281.pdf
Size:
6.41 MB
Format:
Adobe Portable Document Format
Description:

License bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.71 KB
Format:
Item-specific license agreed upon to submission
Description: