Anisotropic 3D columnar micro-film coating for applications in infrared and visible spectral ranges

dc.contributor.authorHu, J.
dc.contributor.authorHan, M.
dc.contributor.authorGrineviciute, L.
dc.contributor.authorNg, S.H.
dc.contributor.authorAnand, V.
dc.contributor.authorKatkus, T.
dc.contributor.authorRyu, M.
dc.contributor.authorMorikawa, J.
dc.contributor.authorTobin, M.J.
dc.contributor.authorVongsvivut, J.
dc.contributor.authorTolenis, T.
dc.date.accessioned2023-07-05T08:13:39Z
dc.date.available2023-07-05T08:13:39Z
dc.date.issued2022
dc.description.abstractPolarisation analysis of thin (∼1 μm) SiO2 films deposited via evaporation at a glancing angle of 70◦ to the normal on resist pillar arrays was carried out using synchrotron-based Fourier transform infrared (s-FTIR) microspectroscopy in reflection mode. Changes in intensity of absorption bands were observed to follow the angular dependence of ∼ cos2 𝜃, consistent with the absorption anisotropy. The strongest absorption was found to be the sharp Si–O–Si stretching vibrational mode at 1040 ± 20 cm−1, which can be used for sensor applications, as well as radiative cooling in the atmospheric transparency window, within the range of 8-13 μm (i.e. 1250-769 cm−1). Anisotropy of IR absorbance is correlated with retardance/birefringence of the same patterns in the visible spectral range. Larger period patterns of 3D columnar SiO2 films of ∼1 μm in thickness deposited on polymer/resist pillar arrays provide the possibility to control anisotropy of the form-birefringent 3D columnar films.et
dc.identifier.urihttps://doi.org/10.1016/j.apsusc.2022.152910
dc.identifier.urihttps://hdl.handle.net/10062/91331
dc.language.isoenget
dc.publisherElsevier B.V.et
dc.relationinfo:eu-repo/grantAgreement/EC/H2020/857627///CIPHRet
dc.relation.ispartofseriesApplied Surface Science;590, p.152910
dc.rightsinfo:eu-repo/semantics/openAccesset
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.subjectIR Fingerprint regionet
dc.subjectAtmospheric transparency windowet
dc.subjectBirefringenceet
dc.subjectDichroismet
dc.subjectSculptured thin filmset
dc.titleAnisotropic 3D columnar micro-film coating for applications in infrared and visible spectral rangeset
dc.typeinfo:eu-repo/semantics/articleet

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